Variable Resistance Memory Device and Method of Manufacturing the Same

ABSTRACT

A variable resistance memory device includes a substrate, a plurality of active lines formed on the substrate, are uniformly separated, and extend in a first direction, a plurality of switching devices formed on the active lines and are separated from one another, a plurality of variable resistance devices respectively formed on and connected to the switching devices, a plurality of local bit lines formed on the variable resistance devices, are uniformly separated, extend in a second direction, and are connected to the variable resistance devices, a plurality of local word lines formed on the local bit lines, are uniformly separated, and extend in the first direction, a plurality of global bit lines formed on the local word lines, are uniformly separated, and extend in the second direction, and a plurality of global word lines formed on the global bit lines, are uniformly separated, and extend in the first direction.

CROSS-REFERENCE TO RELATED FOREIGN APPLICATION

This application claims priority from Korean Patent Application No.10-2006-0097305 filed on Oct. 2, 2006 in the Korean IntellectualProperty Office, the contents of which are herein incorporated byreference in their entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present disclosure is directed to a variable resistance memorydevice and method of manufacturing the same.

2. Description of the Related Art

With an ever-increasing demand for reduction of the power consumption ofmemory devices, research has been conducted on next-generation memorydevices that are nonvolatile and do not need a refresh operation.Examples of next-generation memory devices that are nonvolatile and donot need a refresh operation include phase change random access memory(PRAM) devices using phase change materials, resistive random accessmemory (RRAM) devices using variable resistance materials such astransition metal oxides, and magnetic random access memory (MRAM)devices using ferromagnetic materials. The materials of next-generationmemory devices such as PRAM, RRAM, and MRAM devices have a resistancethat varies according to a current or voltage applied thereto andmaintain a uniform resistance even after the current or voltage is cutoff. In other words, since next-generation memory devices such as PRAM,RRAM, and MRAM devices have nonvolatile properties, they do not need arefresh operation.

FIG. 1 is a circuit diagram of a memory cell 10 of a typicalnext-generation memory device.

Referring to FIG. 1, the memory cell 10 includes a variable resistancedevice 11 and a switching device 12.

The variable resistance device 11 is connected between a bit line BL andthe switching device 12, and the switching device 12 is connectedbetween the variable resistance device 11 and a word line WL.

A next-generation memory device including the memory cell 10 may beclassified as being a PRAM, RRAM, or MRAM device according to the typeof the variable resistance device 11. In other words, if thenext-generation memory device including the memory cell 10 is a PRAMdevice, then the variable resistance device 11 may be formed of amaterial whose resistance varies according to temperature, such asGe—Sb—Te (GST). If the next-generation memory device including thememory cell 10 is an RRAM device, then the variable resistance device 11may be formed of a transition metal oxide and may be interposed betweenan upper electrode and a lower electrode. If the next-generation memorydevice including the memory cell 10 is an MRAM device, then the variableresistance device 11 may be comprised of an insulator that is interposedbetween upper and lower electrodes of a magnetic material.

PRAM cells are disclosed in U.S. Pat. No. 6,760,017, RRAM cells aredisclosed in U.S. Pat. No. 6,753,561, and MRAM cells are disclosed inU.S. Pat. No. 6,724,674.

In the meantime, as the demand for increasing the storage capacity of amemory device increases, the size of memory chips has graduallyincreased. Accordingly, the resistance, the parasitic resistance, andthe capacitance of each signal line in a memory device increase, therebyimposing restrictions on the memory device's ability to performoperations at high speed. In order to address this challenge, methods offorming a hierarchy of signal lines have been applied to typical DRAMdevices, and an example of these methods is disclosed in U.S. Pat. No.6,069,815.

In order to increase the storage capacity and operating speed ofnext-generation memory devices that use variable resistance materials,signal lines must be formed hierarchically. Therefore, it is desirableto develop a new hierarchical layout of signal lines for variableresistance memory cells, in which each variable resistance memory cellis comprised of a variable resistance device and a switching device.

SUMMARY OF THE INVENTION

An embodiment of the present invention provides a variable resistancememory device which can provide high memory cell efficiency.

An embodiment of the present invention also provides a method ofmanufacturing a variable resistance memory device which can provide highmemory cell efficiency.

These and other objects will be described in or be apparent from thefollowing description of exemplary embodiments.

According to an aspect of the present invention, there is provided avariable resistance memory device. The variable resistance memory deviceincludes a silicon substrate, a plurality of active lines which areformed on the silicon substrate, are uniformly separated, and extend ina first direction, a plurality of switching devices which are formed onthe active lines and are separated from one another, a plurality ofvariable resistance devices which are respectively formed on andconnected to the switching devices, a plurality of local bit lines whichare formed on the variable resistance devices, are uniformly separated,extend in a second direction, and are connected to the variableresistance devices, a plurality of local word lines which are formed onthe local bit lines, are uniformly separated, and extend in the firstdirection, a plurality of global bit lines which are formed on the localword lines, are uniformly separated, and extend in the second direction,and a plurality of global word lines which are formed on the global bitlines, are uniformly separated, and extend in the first direction.

According to another aspect of the present invention, there is provideda variable resistance memory device including a silicon substrate, aplurality of active lines which are formed on the silicon substrate, areuniformly separated, and extend in a first direction, a plurality ofswitching devices which are formed on the active lines and are separatedfrom one another, a plurality of variable resistance devices which arerespectively formed on and connected to the switching devices, aplurality of local bit lines which are formed on the variable resistancedevices, are uniformly separated, extend in a second direction, and areconnected to the variable resistance devices, a plurality of local wordlines which are formed on the local bit lines, are uniformly separated,and extend in the first direction, and a plurality of contacts which areformed for each group of variable resistance devices in the firstdirection and connect the plurality of active lines and the plurality oflocal word lines.

According to still another aspect of the present invention, there isprovided a method of manufacturing a variable resistance memory deviceincluding forming a plurality of active lines on a silicon substrate sothat the active lines are uniformly separated and extend in a firstdirection, forming a plurality of switching devices on the active linesso that the switching devices are uniformly separated, forming aplurality of variable resistance devices on the switching devices,forming a plurality of local bit lines on the variable resistancedevices so that the local bit lines are uniformly separated, extend in asecond direction, and are connected to the variable resistance devices,forming a plurality of local word lines on the local bit lines so thatthe local word lines extend in the first direction, forming a pluralityof global bit lines on the local word lines so that the global bit linesextend in the second direction, and forming a plurality of global wordlines on the global bit lines so that the global word lines extend inthe first direction.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features of the embodiments of the present inventionwill become more apparent by describing in detail exemplary embodimentsthereof with reference to the attached drawings.

FIG. 1 is a circuit diagram of a memory cell using a general variableresistance memory device.

FIG. 2 is a circuit diagram of a memory cell array of a variableresistance memory device according to an embodiment of the presentinvention.

FIG. 3 is a layout diagram of a hierarchical signal line structure ofthe memory cell array illustrated in FIG. 2.

FIG. 4 is an enlarged view of portion A of FIG. 3 and illustrates across point memory cell structure, according to an embodiment of theinvention.

FIG. 5 is a cross-sectional view of a memory cell array illustrated inFIG. 4, taken in a first direction.

FIG. 6 is a cross-sectional view of the memory cell array illustrated inFIG. 4, taken in a second direction.

FIG. 7 is a cross-sectional view of a variable resistance memory deviceaccording to another embodiment of the present invention.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

Features of embodiments of the present invention and methods ofaccomplishing the same may be understood more readily by reference tothe following detailed description of exemplary embodiments and theaccompanying drawings. The present invention may, however, be embodiedin many different forms and should not be construed as being limited tothe embodiments set forth herein. Rather, these embodiments are providedso that this disclosure will be thorough and complete and will fullyconvey the concept of the invention to those skilled in the art, and thepresent invention will only be defined by the appended claims. Likereference numerals refer to like elements throughout the specification.

For the convenience of explanation, while the invention will bedescribed with regard to a PRAM device by way of example in thefollowing embodiments, it is to be appreciated that the invention canalso be applied to RRAM, and MRAM devices.

FIG. 2 is a circuit diagram of a memory cell array of a semiconductormemory device 200 according to an embodiment of the present invention.Referring to FIG. 2, the semiconductor memory device 200 includes alocal word line driver region 210, a local bit line selection region220, and a memory cell array region 230.

A plurality of drivers are located in the local word line driver region210. That is to say, the drivers are respectively connected to aplurality of global word lines GWL0 through GWLn, and select andactivate one of a plurality of local word lines LWL0 through LWL3 inresponse to a plurality of local word line selection signals SA00through SA11. The drivers may be realized as inverters, but the presentinvention is not restricted thereto.

A plurality of switches are located in the local bit line selectionregion 220. The switches connect a global bit line GBL to one of thelocal bit lines LBL0 through LBL3 in response to a plurality of localbit line selection signals LA00 through LA11. Each of the switches maybe comprised of only one NMOS transistor, but the present invention isnot restricted thereto.

The local word lines LWL0 through LWL3 and the local bit lines LBL0through LBL3 are arranged in the memory cell array region 230. The localbit lines LBL0 through LBL3 intersect the local word lines LWL0 throughLWL3. A plurality of variable resistance memory cells, like the oneillustrated in FIG. 1, are respectively disposed at the intersectionbetween the local bit lines LBL0 through LBL3 and the local word linesLWL0 through LWL3. The semiconductor memory device 200 may be a Phasechange Random Access Memory (PRAM), Resistive Random Access Memory(RRAM) or Magnetic Random Access Memory (MRAM) device according to thematerials of the variable resistance memory cells.

In other words, a plurality of word lines or bit lines for selectingeach of the variable resistance memory cells of the semiconductor memorydevice 200 are formed hierarchically as the global word lines GWL0through GWLn and the local word lines LWL0 through LWL3 or as the globalbit lines GBL and the local bit lines LBL0 through LBL3.

FIG. 3 is a layout diagram of a hierarchical signal line structure ofthe memory cell array illustrated in FIG. 2. Referring to FIG. 3, thememory cell array includes a plurality of global word lines GWL, aplurality of local word lines LWL0 through LWL3, a plurality of globalbit lines GBL and a plurality of local bit lines LBL0 through LBL3.

The global word lines GWL and the local word lines LWL0 through LWL3 areformed in a first direction, and the global bit lines GBL and the localbit lines LBL0 through LBL3 are formed in a second direction that isperpendicular to the first direction. The first direction may be a rowdirection, and the second direction may be a column direction.

The local bit lines LBL0 through LBL3, the local word lines LWL0 throughLWL3, the global bit lines GBL, and the global word lines GWL may beformed of a metal having high conductivity. The local bit lines LBL0through LBL3, the local word lines LWL0 through LWL3, the global bitlines GBL, and the global word lines GWL may be formed in differentinterconnection layers. In other words, the local bit lines LBL0 throughLBL3 may be formed in a first metal interconnection layer, the localword lines LWL0 through LWL3 may be formed in a second metalinterconnection layer, the global bit lines GBL may be formed in a thirdmetal interconnection layer, and the global word lines GWL may be formedin a fourth metal interconnection layer. An insulation layer is formedamong the first through fourth metal interconnection layers.

Also, four local bit lines (LBL0 through LBL3) are allocated for each ofthe global bit lines GBL, and four local word lines (LWL0 through LWL3)are allocated for each of the global word lines GWL. The number of localbit lines allocated for each of the global bit lines GBL or the numberof local word lines allocated for each of the global word lines GWL maybe increased to 2n (where n is a natural number).

FIG. 4 is an enlarged view of portion A of FIG. 3, and illustrates across point memory cell structure. In the cross point memory cellstructure, memory cells have the same size as the intersection betweenword lines and a bit lines. A semiconductor memory device having thecross point memory cell structure can maximize memory cell efficiency.

Referring to FIG. 4, a plurality of variable resistance memory cells arerespectively located at intersection between a plurality of local wordlines LWL0 through LWL3 and a plurality of local bit lines LBL0 throughLBL3, as indicated by circles, thereby realizing a cross point memorycell structure.

FIG. 5 is a cross-sectional view of the memory cell array illustrated inFIG. 4, taken in a first direction V-V′, and FIG. 6 is a cross-sectionalview of the memory cell array illustrated in FIG. 4, taken in a seconddirection VI-VI′. The layout of a semiconductor memory device accordingto an embodiment of the present invention, and a method of manufacturinga semiconductor memory device according to an embodiment of the presentinvention will hereinafter be described in detail with reference toFIGS. 3 through 6.

Referring to FIGS. 3 through 6, a plurality of active lines ACT areformed on a semiconductor substrate P-SUB, and are uniformly separated.The active lines ACT extend in the first direction (e.g., anx-direction). The active lines ACT may be formed of an n+-type materialdoped with a high concentration of impurities.

A plurality of switching devices 12 are formed on the active lines ACTso that the switching devices 12 are separated from one another. Theswitching devices 12 may be diodes. The switching devices 12 may beformed using a selective epitaxial growth method. The cathodes of thediodes comprising the switching devices 12 are connected to the activelines ACT.

A plurality of lower contacts BC are respectively formed on theswitching devices 12. The lower contacts BC electrically connect theanodes of the switching devices 12 to a plurality of local bit linesLBL0 through LBL3.

Thereafter, a plurality of variable resistance elements GST arerespectively formed on the lower contacts BC. Here, the variableresistance elements GST may be formed of a variety of types ofcompounds, including a binary (two-element) compound such as GaSb, InSb,InSe, Sb₂Te₃, or GeTe, a ternary (three-element) compound such asGeSbTe, GaSeTe, InSbTe, SnSb₂Te₄, or InSbGe, or a quaternary(four-element) compound such as AgInSbTe, (GeSn)SbTe, GeSb(SeTe), orTe₈₁Ge₁₅Sb₂S₂. The anodes of the diodes comprising the switching devices12 are connected to the variable resistance elements GST.

Thereafter, a plurality of upper contacts TC are respectively formed onthe variable resistance elements GST, thereby completing the formationof a plurality of variable resistance memory cells.

First through fourth metal interconnection layers M1 through M4 foraccommodating a plurality of signal lines that are used to select eachof the variable resistance memory cells are formed on the variableresistance memory cells.

The local bit lines LBL0 through LBL3 are formed in the first metalinterconnection layer M1, which is the lowermost interconnection layerof the first through fourth metal interconnection layers M1 through M4.The local bit lines LBL0 through LBL3 are uniformly separated and extendin the second direction (e.g., a y-direction). The local bit lines LBL0through LBL3 are connected to the variable resistance elements GST viathe upper contacts TC.

A plurality of local word lines LWL0 through LWL3 are formed in thesecond metal interconnection layer M2, which is formed on the firstmetal interconnection layer M1, and extend in the first direction (e.g.,the x-direction). The local word lines LWL0 through LWL3 are uniformlyseparated. The local word lines LWL0 through LWL3 respectivelycorrespond to the active lines ACT, and are connected to the activelines ACT via word line contacts WC. In particular, the word linecontacts WC are arranged only in sub-word line drive regions illustratedin FIG. 3. In order to reduce the resistance of the active lines ACT,however, the word line contacts WC may also be formed for each group ofmemory cells.

Memory cells that are adjacent to the word line contacts WC are formedusing a different method from those used to form memory cells that arenot adjacent to the word line contacts WC, and thus has differentproperties from memory cells that are not adjacent to the word linecontacts WC. Referring to FIG. 7, upper contacts TC may not be formed onvariable resistance elements GST for memory cells that are adjacent toword line contacts WC. In other words, the memory cells that areadjacent to the word line contacts WC may serve as dummy memory cells.The dummy memory cells that are adjacent to the word line contacts WCmay be formed in the second direction (e.g., the y-direction).

A plurality of global bit lines GBL are formed in the third metalinterconnection layer M3, which is formed on the second metalinterconnection layer M2. The global bit lines GBL are uniformlyseparated, and extend in the second direction (e.g., the y-direction).Four local bit lines LBL0 through LBL3 are allocated for each of theglobal bit lines GBL, and each of the global bit lines GBL isselectively connected to the four local bit lines LBL0 through LBL3 inresponse to a plurality of local bit line selection signals LA00 throughLA11 by a plurality of selection transistors in the local bit lineselection region 220 illustrated in FIG. 2.

A plurality of global word lines GWL are formed in the fourth metalinterconnection layer M4, which is formed on the third metalinterconnection layer M3. The global word lines GWL are uniformlyseparated, and extend in the first direction (e.g., the x-direction).Four local word lines LWL0 through LWL3 are allocated for each of theglobal word lines GWL, and each of the global word lines GWL isselectively connected to the four local word lines LWL0 through LWL3 byrespective drivers in the local word line driver region 210 illustratedin FIG. 2.

The local bit lines LBL0 through LBL3, the local word lines LWL0 throughLWL3, the global bit lines GBL, and the global word lines GWL may beformed of a metal having high conductivity. An insulation layer may beformed among the first through fourth metal interconnection layers M1through M4 in order to electrically insulate the first through fourthmetal interconnection layers M1 through M4 from one another.

According to the embodiment illustrated in FIGS. 2 through 4, four localbit lines are allocated for each global bit line, and four local wordlines are allocated for each global word line. However, the presentinvention is not restricted to this. In other words, the number of localbit lines allocated for each global bit line or the number of local wordlines allocated for each global word line may be altered.

According to another embodiment of the invention, a plurality of globalword lines GWL are formed in the third metal interconnection layer M3,which is formed on the second metal interconnection layer M2. Also, aplurality of global bit lines GBL are formed in the fourth metalinterconnection layer M4, which is formed on the third metalinterconnection layer M3.

As described above, according to an embodiment of the present invention,a plurality of local bit lines, local word lines, global bit lines, andglobal word lines are formed in different interconnection layers, thusenabling a memory device to perform its operations at high speed. Inaddition, according to an embodiment of the present invention, aplurality of variable resistance memory cells are respectively formed atthe intersection between a plurality of local bit lines and a pluralityof local word lines, thus guaranteeing optimum memory cell efficiency.

While embodiments pf the present invention has been particularly shownand described with reference to exemplary embodiments thereof, it willbe understood by those of ordinary skill in the art that various changesin form and details may be made therein without departing from thespirit and scope of the present invention as defined by the followingclaims. It is therefore desired that the present embodiments beconsidered in all respects as illustrative and not restrictive,reference being made to the appended claims rather than the foregoingdescription to indicate the scope of the invention.

1. A variable resistance memory device comprising: a silicon substrate;a plurality of active lines which are formed on the silicon substrate,are uniformly separated, and extend in a first direction; a plurality ofswitching devices which are formed on the active lines and are separatedfrom one another; a plurality of variable resistance devices which arerespectively formed on and connected to the switching devices; aplurality of local bit lines which are formed on the variable resistancedevices, are uniformly separated, extend in a second direction, and areconnected to the variable resistance devices; a plurality of local wordlines which are formed on the local bit lines, are uniformly separated,and extend in the first direction; a plurality of global bit lines whichare formed on the local word lines, are uniformly separated, and extendin the second direction; and a plurality of global word lines which areformed on the global bit lines, are uniformly separated, and extend inthe first direction.
 2. The variable resistance memory device of claim1, wherein the local word lines respectively correspond to the activelines and are connected to the active lines by a plurality of contacts.3. The variable resistance memory device of claim 1, wherein the localbit lines are divided into one or more groups, each group comprising 2nlocal bit lines where n is a natural number, and 2n local bit lines areallocated for each of the global bit lines.
 4. The variable resistancememory device of claim 1, wherein the local word lines are divided intoone or more groups, each group comprising 2n local word lines where n isa natural number, and 2n local word lines are allocated for each of theglobal word lines.
 5. The variable resistance memory device of claim 3,wherein each of the global bit lines is selectively connected to one ofthe 2n local bit lines allocated in response to a local bit lineselection signal.
 6. The variable resistance memory device of claim 4,wherein each of the global word lines is selectively connected to one ofthe 2n local word lines allocated in response to a local word lineselection signal.
 7. The variable resistance memory device of claim 1,wherein the switching devices comprise diodes, the cathodes of thediodes are connected to the active lines, and the anodes of the diodesare connected to the variable resistance devices.
 8. The variableresistance memory device of claim 7, wherein the variable resistancedevices comprise phase change materials or transition metal oxides thatare interposed between an upper electrode and a lower electrode.
 9. Avariable resistance memory device comprising: a silicon substrate; aplurality of active lines which are formed on the silicon substrate, areuniformly separated, and (extend in a first direction; a plurality ofswitching devices which are formed on the active lines and are separatedfrom one another; a plurality of variable resistance devices which arerespectively formed on and connected to the switching devices; aplurality of local bit lines which are formed on the variable resistancedevices, are uniformly separated, extend in a second direction, and areconnected to the variable resistance devices; a plurality of local wordlines which are formed on the local bit lines, are uniformly separated,and extend in the first direction; a plurality of global word lineswhich are formed on the local word lines, are uniformly separated, andextend in the first direction; and a plurality of global bit lines whichare formed on the global word lines, are uniformly separated, and extendin the second direction.
 10. A variable resistance memory devicecomprising: a silicon substrate; a plurality of active lines which areformed on the silicon substrate, are uniformly separated, and extend ina first direction; a plurality of switching devices which are formed onthe active lines and are separated from one another; a plurality ofvariable resistance devices which are respectively formed on andconnected to the switching devices; a plurality of local bit lines whichare formed on the variable resistance devices, are uniformly separated,extend in a second direction, and are connected to the variableresistance devices; a plurality of local word lines which are formed onthe local bit lines, are uniformly separated, and extend in the firstdirection; and a plurality of contacts which are formed for each groupof variable resistance devices in the First direction and connect theplurality of active lines and the plurality of local word lines.
 11. Thevariable resistance memory device of claim 10, wherein variableresistance devices that are adjacent to the contacts are not connectedto any local bit line and form dummy memory cells.
 12. The variableresistance memory device of claim 11, wherein the dummy memory cells areseparated in the second direction.
 13. The variable resistance memorydevice of claim 10, further comprising: a plurality of global bit lineswhich are formed on the local word lines, are uniformly separated, andextend in the second direction; and a plurality of global word lineswhich are formed on the global bit lines, are uniformly separated, andextend in the first direction.
 14. The variable resistance memory deviceof claim 10, further comprising: a plurality of global word lines whichare formed on the local word lines, are uniformly separated, and extendin the first direction; and a plurality of global bit lines which areformed on the global word lines, are uniformly separated, and extend inthe second direction.
 15. A method of manufacturing a variableresistance memory device comprising: forming a plurality of active lineson a silicon substrate so that the active lines are uniformly separatedand extend in a first direction; forming a plurality of switchingdevices on the active lines so that the switching devices are uniformlyseparated; forming a plurality of variable resistance devices on theswitching devices; forming a plurality of local bit lines on thevariable resistance devices so that the local bit lines are uniformlyseparated, extend in a second direction, and are connected to thevariable resistance devices; forming a plurality of local word lines onthe local bit lines so that the local word lines extend in the firstdirection; forming a plurality of global bit lines on the local wordlines so that the global bit lines extend in the second direction; andforming a plurality of global word lines on the global bit lines so thatthe global word lines extend in the first direction.
 16. The method ofclaim 15, further comprising forming a plurality of contacts whichconnect the local word lines correspond to the active lines,respectively.
 17. The method of claim 15, wherein the switching devicescomprise diodes, and are formed using a selective epitaxial growthmethod.
 18. The method of claim 17, further comprising forming aplurality of lower contacts between the diodes and the variableresistance devices.
 19. The method of claim 18, further comprisingforming a plurality of upper contacts between the variable resistancedevices and the local bit lines.
 20. The method of claim 16, furthercomprising forming a plurality of upper contacts between the variableresistance devices and the respective local bit lines, but not betweenvariable resistance devices that are adjacent to the contacts andrespective corresponding local bit lines.